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《Modern Manufacturing Engineering》 2012-05
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Review on the development policy and measurement of MEMS in main countries/regions

Wan Yong,Pan Yi,Huang Jian(Wuhan Library of Chinese Academy of Sciences,Wuhan 430071,China)  
MEMS is the micro electro-mechanical devices or systems,and consisted of micro sensors,micro actuator and micro system.The manipulation and processing dimension was extended into nanometer level by MEMS because of its small size,high level integration and flexible function.Meanwhile,being emerging high tech industry,MEMS was one of the technology commanding points contested by main countries/regions over the world.Some policy and measurement from main countries and regions were introduced,and advice for MEMS development in China was brought forward.
【CateGory Index】: TH703
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Chinese Journal Full-text Database 1 Hits
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