Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
Add to Favorite Get Latest Update

Optimum Design of Pendulous Micromachined Silicon Accelerometer

Qiu Anping Wang Shourong Chen Wei Southeast University,Nanjing 210096  
The structure,principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer(PMSA)are introduced in this paper.The caculating results show that the performance of PMSA can greatly improve via optimizing its parameters.
【CateGory Index】: TH824.4
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 1 Hits
1 Guo Xiuzhong; Cheu Jiabin (Nanjing University of Aeronautics and Astronautics);Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer[J];JOURNAL OF CHINESE INERTIAL TECHNOLOGY;1995-03
Chinese Journal Full-text Database 5 Hits
1 GAO Yan,SHI Wen-kang,JI Xiao-jun(Shanghai Jiaotong University,Shanghai 200240,China);Design of Driving Circuit for Microsensor and Its Optimization[J];Chinese Journal of Sensors and Actuators;2007-04
2 SU Yan 1 ,YANG Yong -jun 2 ,WANG Shou -rong 1 ,ZHOU Bai -ling 1 (1.Department of Instrument Science and Engineering,Southeast Univers ity,Nanjing 210096,China;2.Hebei Semiconductor Research Institute,Shijiazhuang 050051,China);A silicon micro-mechanical vibratory angular rate sensor[J];Journal of Functional Materials and Devices;2002-02
3 ;A Study of Preparation Technologies and Testing Methods of a Micro-silicon Accelerometer[J];MEASUREMENT & CONTROL TECHNOLOGY;1999-01
4 ;Research on Pendulous Micromechanical Accelerator System[J];MEASUREMENT & CONTROL TECHNOLOGY;1999-03
5 Zhang Yane (Southeast University);A Study of Preparation Technologues and Testing Methods of a MicroSilicon Accelerometer[J];JOURNAL OF CHINESE INERTIAL TECHNOLOGY;1998-04
Chinese Journal Full-text Database 10 Hits
1 SHI Yun-bo,QI Xiao-jin,LIU Jun (National Key Laboratory for Electronic Measurement Technology, North University of China,Taiyuan 030051,China);Design of the Sensing Element of MEMS Accelerometer used in the Fuze[J];Semiconductor Technology;2006-07
2 ZENG Zhao Jun,SHI Jin Jie (Institute of Microelectronics, Peking University, Beijing 100871, China);A novel piezoresistive accelerometer with high accuracy and overload ability[J];Micronanoelectronic Technology;2003-Z1
3 LI Li-jie and LIANG Chun-guang[KH2D](Hebei Semiconductor Research Institute,Shijiazhuang 050051,China);Micromachined Convective Accelerometer[J];Chinese Journal of Semiconductors;2001-04
4 LIANG Chun guang,XU Yong qing and YANG Yong jun(The Electronic 13th Institute of Information Industry Ministry,Shijiazhuang 050051,China);Fabrication of MEMS Optical Switches[J];Chinese Journal of Semiconductors;2001-12
5 Wei Huazheng 1,Guo Fangmin 1,Lai Zhongsheng 1,Zhu Shouzheng 1,Zhu Ziqiang 1, Li Xiaowei 2,Cheng Zhiqun 2 and Sun Xiaowei 2(1 College of Information Science & Technology,East China Normal University,Shanghai 200062,China) (2 Shanghai Institute o;Computer-Aided Design of RF-MEMS Switch[J];Chinese Journal of Semiconductors;2002-09
6 WANG Li li (Mechanics and Materials Science Research Centre, Ningbo University, Ningbo 315211, Zhejiang, China);Progress in Studies on Dynamic Response of Structures and Materials under Explosive/Impact Loading[J];Explosion and Shock Waves;2001-02
7 XU Lin-yan~1,LI Da-chao~ 1,2* ,HU Xiao-tang~1,ZHANG Hai-xia~2,HUANG Yu-bo~1 1.State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China; 2.National Key Laboratory of Micro / Nano Fabrication Technology, Peking University, Beijing 100871, China;Mechanical Characterization of Nanostructures Using Nanobending-Based Test[J];Chinese Journal of Sensors and Actuators;2006-05
8 MENG Mei-yu,SHI Yun-bo,LIU Jun,QI Xiao-jin (National Key Laboratory for Electronic Measurement Technology,Key Laboratory of Instrumentation Science & Dynamic Measurement Ministry of Education,North University of China,Taiyuan 030051, China);Research on High g Micro Accelerometer[J];Chinese Journal of Sensors and Actuators;2008-02
9 JIN Lei,GAO Shi-qiao,LI Wen-jie (Dept. of Mech. & Electron Engin.,Beijing Institute of Technology,Beijing 100081,China);Design of silicon microstructure for micro electro-mechanism sensor system[J];JOURNAL OF TRANSDUCER TECHNOLOGY;2000-02
10 CHEN De - ying (Microelectronic Centre,Southeast University,Nanjing 210096,China);Preparation of tunneling - based acceleration sensor[J];Journal of Transducer Technology;2000-06
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved