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Design and Precision Experiment of Non-Contact Surface Probe

YUAN Jiang;LU Jing;SHAO Jian-xin;QIU Zi-xue;WANG Shu-fang;School of Mechanical Engineering,Nantong University;  
The laser probe is difficult to meet the high accuracy measurement requirements for wide-range free-form surface due to its small measurement range. A non-contact probe integrated laser probe and grating ruler was designed by the servo motion control technology. The laser probe was controlled in the center range and its linearity error was smaller,and the grating ruler was used to feedback to achieve wide-range measurement. The system hardware and software design were introduced in detail. Compared with laser probe,experimental data processing results show that the non-contact probe measuring range is expanded 1 times while its accuracy index have not declined such as the measurement uncertainty,correction value,linearity,and etc.
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