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《Piezoelectrics & Acoustooptics》 2004-04
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Present Status and Future of CMOS MEMS Technology

HU Ming,CUI Meng,TIAN Bin,DOU Yan-wei (School of Electronic Information Engineering, Tianjin University,Tianjin 300072,China)  
Development of MEMS and the important position of CMOS technology in MEMS are introduced. Three different CMOS MEMS fabrication approaches, pre-CMOS, intermediate-CMOS and post-CMOS, are introduced emphatically and examples are given.Discussing key challenges and future application field for CMOS MEMS in detail.Finally, based on the present situation in our country, some ideas about development of CMOS MEMS in China are put forward.
【Fund】: 国家自然科学基金(60371030)
【CateGory Index】: TN402
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