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《Journal of Astronautics》 2002-01
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Design and analysis of a multi-finger micromechanical silicon accelerometer

QIN Jun hua,DONG Jing xin (Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084)  
A kind of multi finger micromechanical silicon accelerometer with mediumlow performance designed for either commercial or military markets is designed and simulated.Its sensitive direction is parallel to the proof mass and its spring adopts the folded beam.Its structural parameters are designed and determined.This paper discusses emphatically the difference of the accelerometer's frequency and mechanical behavior,caused by the changes of the spring's parameters.In the end,a performance satisfied accelerometer is described.The size of its proof mass is 1 6 mm×1 0 mm,its full scale is 10g and its resolution is 0 5×10 -3 g.
【Fund】: 国防科工委重点项目 (8.7.1.1)和 (6A5 .4.3 )
【CateGory Index】: V441
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【References】
Chinese Journal Full-text Database 5 Hits
1 REN Jie , FAN Shang-chun (School of Instrument Science & Opto-electronics Engineering,Beihang University 100083,China);A Dual-Axis Capacitive Micromechanical Accelerometer[J];Chinese Journal of Sensors and Actuators;2006-05
2 ;Structure Design & Analysis On Variable-Capacitance Micromechanical Accelerometer[J];Sensor World;2006-08
3 DU Min1,LIN Wei1,LU Peng1,LI Jianli2(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China;2.Beijing University ofAeronautics and Astronautics,Beijing 100083,China);Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J];Journal of Earthquake Engineering and Engineering Vibration;2007-06
4 QIU Li-Fang,LIU Dan,WENG Hai-Shan (School of Mechanical Engineering,University of Science and Technology Beijing,Beijing 100083);Optimization and Simulation of a Multi-finger Micro-accelerometer[J];Development & Innovation of Machinery & Electrical Products;2007-02
5 ZHANG HONGZHEN WU XUE ZHONG XIAO DINGBANG;Design and closed-loop detection of a comb microaccelerometer[J];Control & Automation;2007-14
【Citations】
Chinese Journal Full-text Database 1 Hits
1 YUAN Guang, DING Henggao, GAO Zhongyu DONG Jingxin Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China;Design a multi finger silicon micromechanical accelerometer[J];JOURNAL OF TSINGHUA UNIVERSITY(SCIENCE AND TECHNOLOGY);1998-11
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 LIU Yu 1,2 ,WEN Zhi Yu 1,ZHANG Liu Qiang 1,LIANG Yu Qian 1,WEN Zhong Quan 1,LI Xia 1 (1. College of Opto Electronic Engineering , Chongqing University, Chongqing 400044,China; 2. College of Automoble Engineering, Chongqing Institute of Technology, Chongqing 400044,China);Solution of the stiffness of 2-D capacitive silicon microaccelerometer[J];Micronanoelectronic Technology;2003-Z1
2 ZHENG Xu-dong,CAO Xue-cheng,ZHENG Yang-ming,LUO Si-jian,WANG Yue-lin,JIN Zhong-he (Department of Information Science & Electronic Engineering, Zhejiang University, Hangzhou 310027, China);Study of a Novel Micromachined Capacitive Accelerometer[J];Chinese Journal of Sensors and Actuators;2008-02
3 LI Tong-jie,DONG Jing-xin*,LIU Yun-feng(Department o f Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);Design and Realization of Comb-Finger Micromechanical Accelerometer[J];Chinese Journal of Sensors and Actuators;2009-03
4 ZHENG Ying-bin, SU Wei, HE Xiao-ping (Inst of Elct Engin,China Academy of Engineering Physics,Mianyang 621900,China);Coupled electrostatic-mechanical analysis for a multi-finger micro-accelerometer[J];Journal of Transducer Technology;2002-05
5 LI Jiang, GAO Zhong-yu, DONG Jing-xin (Dept of Precision Instr,Tsinghua University, Beijing 100084, China);Study on the mechanical stiffness of the flexible beams in a micro-machined accelerometer[J];Journal of Transducer Technology;2003-09
6 LI Jiang, DONG Jing-xin, LIU Yun-feng, WU Tian-zhun(Dept of Precision Instr,Tsinghua University,Beijing 100084,China);Effects of preload voltage on performance of force-rebalance micro silicon accelerometer[J];Journal of Transducer Technology;2004-08
7 ZHU Yi, GUO Dan (State Key Laboratory of Tribology,Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);COUPLED SIMULATIVE ANALYSIS FOR DRIVE CHARACTERISTIC OF MICRO-COMB STRUCTURES[J];Engineering Mechanics;2008-07
8 GAO Zhong yu, NIU Xiao ji, GUO Mei feng (Department of Precision Instruments and Mechanology, Tsinghua University, Beijing 100084, China);Quaternion-Based Kalman Filter for Micro-machined Strapdown Attitude Heading Reference System[J];中国航空学报(英文版);2002-03
9 ;Special Problems About Design of a Micromechanical Accelerometer[J];Measurement & Control Technology;2002-12
10 Zheng Xiaohu~(1,2),Zhu Di~(1)(~1College of Mechanical & Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nan'jing 210016;~2 Huaiyin Institute of Technology,Huai′an 223001);Novel Design And Simulation of a Capacitance Type Novel Micro-accelerometer[J];Mechanical Science and Technology;2006-03
China Proceedings of conference Full-text Database 1 Hits
1 LI Jiang,DONG Jingxin,LIU Yunfeng,WU Tianzhun (Department of Precision Instruments & Mechanology, Tsinghua University,Beijing 100084);Preload Voltage's Effects on the Performance of a Force-rebalance Micro Silicon Accelerometer[A];[C];2003
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 GUAN Rong-feng, WANG Xue-fang, GAN Zhi-yin, WANG Zhi-yong, LIU Sheng, ZHANG Hong-hai, HUANG De-xiu (Huazhong University of Science and Technology a. Institute of Microsystems; b.Department of Opto-electronics Engineering, Wuhan 430074, China);Study on MEMS Packaging Technology and Its Standard Process[J];Semiconductor Technology;2005-01
2 HE Hong-tao,XU Yong-qing,YANG Yong-jun,LU Miao,ZHENG Feng,LIN Hai-feng (Hebei Semiconductor Research Institute(HSRI ),Shijiazhuang050051,China);A bulk-silicon micro-accelerometer with comb differential-capacitance[J];Semiconductor Information;2002-11
3 Lü Shuhai,Yang Yongjun,Xu Shujing,Xu Aidong,Xu Yongqing (The 13th Research Institute,CETC,Shijiazhuang 050051,China);Research on a Novel MEMS 3-Axial Convective Accelerometer[J];Micronanoelectronic Technology;2008-04
4 Dai Qiang,Yu Qi,Rao Qing,Zhou Wei,and Yang Mohua(State Key Laboratory of Electronic Thin Films And Integrated Devices,University of Electronic Science andTechnology of China,Chengdu 610054,China);Pulse and Step Signal Response Models of Micro-Accelerometers Based on the Comb Gaps Deviation[J];Journal of Semiconductors;2008-07
5 CHEN Wei-ping , ZHAO Zhen-gang , LIU Xiao-wei , HAN Tian (MEMS Center, Harbin Institute of Technology, Harbin 150001 ,China);Design of Force-Balance Accelerometer with Frame Structure[J];Chinese Journal of Sensors and Actuators;2006-05
6 LI Tong-jie,DONG Jing-xin*,LIU Yun-feng(Department o f Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China);Design and Realization of Comb-Finger Micromechanical Accelerometer[J];Chinese Journal of Sensors and Actuators;2009-03
7 HU Hong ge, WEN Gui yin, YU Cong xi, HU Jun, Zhao Xi jun (Inst. of Electronic Engin.,China Academy of Engineering Physics,Mianyang 621900,China);Noise behavior of capacitive micro-accelerometer[J];Journal of Transducer Technology;2001-11
8 LI Jiang, GAO Zhong-yu, DONG Jing-xin (Dept of Precision Instr,Tsinghua University, Beijing 100084, China);Study on the mechanical stiffness of the flexible beams in a micro-machined accelerometer[J];Journal of Transducer Technology;2003-09
9 DUAN Chengli1, QI Wenjie2(1.National Defence Technology Information Center,Beijing 100036,China;2.The 49th Research Institute, China Electronics Technology Group Corporation,Harbin 150001 ,China);Development trend and countermeasure of military sensor[J];Journal of Transducer Technology;2003-11
10 XU Hong-qiang, CHEN Hua-ling (Inst of Mech Engin,Xi'an Jiaotong University,Xi'an 710049,China);Analysis of coupled electrostatic-mechanical field for interdigital micro-accelerometer[J];Journal of Transducer Technology;2004-07
【Secondary References】
Chinese Journal Full-text Database 5 Hits
1 CHEN Wei-ping,ZHAO Zhen-gang,DING Jin-ling,LIU Xiao-wei,MA Yuan-fang(MEMS Center,Institute of Technology,Harbin 150001,China);The Comb Electrode Dual-Axis Micromachined Accelerometer[J];Chinese Journal of Sensors and Actuators;2008-04
2 Huang Yu (School of Science,Harbin Engineering University,Harbin 150001,China);The Stress and Model Analysis of Oscillator for Miniature Torsion Pole Spring Tiltmeter based on ANSYS Software[J];Journal of Electronic Measurement and Instrument;2008-S2
3 BAO Lu-lu1,2,KONG De-yi1,LIN Bing-tao1,2,JIANG Ru-long1,2(1.State Key Laboratory of Transducer Technology,Institute of Intelligent Machines,Chinese Academy of Scienes,Hefei 230031,China;2.University of Science & Technology of China,Hefei 230027,China);Design of dual-axis micromachined accelerometer[J];Transducer and Microsystem Technologies;2009-07
4 OUYanjiang①②, YIN Guofu①, ZHOUChangchun①, LIULi① (①School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, CHN; ②Mechanical Engineering Department, Chengdu Electromechanical College, Chengdu 610031, CHN);Multidisciplinary Optimization Design Method for Three-levels Modeling MEMS[J];Manufacturing Technology & Machine Tool;2009-01
5 LI Shilin1,2,WANG Mingquan1,2,KANG Xiaoyue1,2,ZHAO Qi3(1.Key laboratories of the dynamic testing technology,North University of China,Taiyuan 030051,China;2.School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;3.School of Mechanical Engineering & Automation,North University of China,Taiyuan 030051,China);Fine Capacitance Measurement for Broken and Weak Points Detection of Powder Hose[J];Journal of Detection & Control;2010-06
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