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《Journal of Astronautics》 2006-05
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Data Processing and Testing of the Open-Loop Characteristics for the Silicon Resonant Microsensor

FAN Shang-chun,YANG Jun,XIAO Zhi-ming,CAI Cheng-guang(School of Instrument,Beihang University,Beijing 100083,China)  
For the sake of calculating the resonant frequency,resonant amplitude and quality factor of silicon resonant microsensor accurately,several data processing algorithms such as lowpass and reformative method of least squares are analyzed and compared by emulation and experiments,based on the theoretical model of silicon resonant microsensor and the actual data acquired by the Open-loop characteristics test,and the holistic best algorithm is found.The program designed is the special data processing program of the Open-loop characteristics test system developed by,but the algorithms discussed in this paper can also be applied to similar data processing and have extensive referrible value.
【Fund】: “国家自然科学基金资助项目谐振式硅微结构压力传感器优化设计与闭环系统实现(50275009)”资助
【CateGory Index】: V441
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