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《CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT》 1999-04
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Study on Closed-loop Driving Circuits of Micromechanical Resonator with Constant Vibrating Amplitude

Wang Yaqiang;Wang Yuelin;Ding Chun;Yu Hao (Dept. of Information &. Electronic Engineering, Zhejiang University, Hangzhou 310027) (State Key Laboratories of Transducer Technology, Shanghai Institute of Metallurgy, Shanghai 200050)  
In this paper, we analyze the characteristics of closed-loop micromechanical resonator. We research the design principles of the closed loop driving circuits of micromechanical resonator with constant vibrating am- plitude on the basis of analysis. Then, we develop the closed-loop driving circuits and apply the circuits to the micromechanical resonators.
【Fund】: 曹光彪基金
【CateGory Index】: TP212
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