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《Chinese Journal of Scientific Instrument》 2002-S2
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Integrated Silicon Pressure Sensor with PMOS Ring Oscillators

Yue Ruifeng Liu Litian(Institute of Microelectronics, Tsinghua University, Beijing 100084, China )  
We developed a kind of integrated silicon pressure sensor with PMOS ring oscillators, and showed its structure, fabrication method and initial results.
【CateGory Index】: TP212
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