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《Chinese Journal of Scientific Instrument》 2009-05
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Design and implementation of optical micro-scanning thermal microscope imaging system with high resolution

Gao Meijing1,2,Jin Weiqi1,Wang Xia1,Xu Chao1,Chen Yinan1(1 Department of Optical Engineering,Beijing Institute of Technology,Beijing 100081,China;2 Department of Photoelectron,Yanshan University,Qinhuangdao 066004,China)  
To improve the spatial resolution of the developed thermal microscope based on the uncooled focal plane arrays,a novel high resolution thermal microscope imaging system with optical plate rotating micro-scanner is designed.The working principle of the optical plate rotating micro-scanner is analyzed.Moreover,the parameter design,the error analysis,the process tolerance,the technical parameters and the composition of the whole system are all given.The results of standard oversample reconstruction for real thermal microscope images show that the design of system is successful and achieves higher resolution.The system can be applied into many systems which need high spatial resolution.
【Fund】: 北京市自然科学基金(4062029)资助项目
【CateGory Index】: TN16
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