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《Chinese Journal of Scientific Instrument》 2015-05
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A quantitative error compensation model of the inclination angle of the laser displacement sensor

Sun Bin;Li Bing;State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University;  
Laser displacement sensor is an effective measuring instrument widely used in the field of precision testing. It is characterized that non-contact,large measuring range and high measuring efficiency. However,the measurement accuracy is affected by the incidence angle. In order to improve the measurement accuracy of the laser displacement sensor,it is necessary to carry out analysis and deduced a quantifiable error-compensation model of the incident angle. Based on the principle of laser triangulation measurement,the optical path of the laser beam to be analyzed and reason for the loss of light intensity is found. The equation of object and image is established according to the geometric characteristics of the optical path. A quantifiable error-compensation model is proposed from the angle of error mechanism. Finally,experiment was completed with laser interferometer and sine gauge on CMM,by introducing error model. The experimental result is improved,and the measurement accuracy is not greater than 10 μm. Results show that the model inclination error is accurate and effective,which indicates application potential in complex surface measurement applications.
【Fund】: 国家973计划(2013CB035704);; 国家自然科学基金面上项目(51275398);; 陕西省科技统筹创新工程计划重大科技成果转化引导专项(2013KTCG01-15)项目资助
【CateGory Index】: TP212
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