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《Journal of Applied Optics》 2007-05
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New method for displacement measurement in nanometer level using speckle interference and gray level

LI Lin-sen,HU Man-li,JIA Fang,HAO Jing-bo,LIN Qiao-wen,ZHOU Jing-hui(Department of Physics,Northwest University,Xi′an 710069,China)  
The phase shifting method is widely used to eliminate the difficulty of the subwavelength displacement measurement in the speckle interference metrology,but it is very inconvenient to use.In this paper,the microdisplacement measurement method using the hybrid of gray-level and speckle interference is proposed,which is different from the previous phase shifting method.This method overcomes the difficulty of finding a complete fringe pattern when the deformation or displacement is less than half of a wavelength.The measurement principle of the method was described,and the experiment was carried out.The feasibility of this method was verified.Therefore,an easier method is given for speckle interference metrology.
【Fund】: 陕西省教育厅专项科研计划基金资助项目(04JK338)
【CateGory Index】: O439
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【Citations】
Chinese Journal Full-text Database 6 Hits
1 LI Xin-zhong1 SONG Wen-wu2 WANG Xi-jun1(1.Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;2.Jiangsu Shuguang Optics and Electronic Instrument Plant, Yangzhou 225000, China);Laser Speckle Measurement Techniques and It's Applications[J];Optics Mechanics & Electronics Information;2005-03
2 Wang Xin Jia Shuhai(Department of Optical Information Science and Engneering,School of Science,Xi'an Jiaotong University,Xi'an 710049);Novel Phase Unwrapping Algorithm for Digital Speckle Pattern Interferometry[J];Acta Optica Sinica;2006-05
3 LI Guang-hua, ZHANG Ai-min, ZHANG Hang, WU Yan(School of Electrical Engineering, Xi'an Jiaotong University, Xi'an 710049, China);Application of Savitzky-golay Digital Smooth Filter in Processing of On-line Testing Data in Circuit Breaker[J];High Voltage Apparatus;2005-03
4 Wang Qin, Huang Liqing,Wang Yongchang Department of Optic Information Science and Technology, Xi′an Jiaotong University, Xi′an, 710049,China;Real-time method of measuring little displacement by speckle photography[J];Acta Photonica Sinica;2003-08
5 FU Si-hua,YU Qi-feng(National University of Defense Technology, Changsha 410073,China);Filtering Methods of the Digital Speckle fringe Pattern[J];Journal of Applied Optics;2005-04
6 ZHU Ri-hong,CHEN Lei,WANG Qing, GAO Zhi-shan,HE Yong(Nanjing University of Science & Technology,Nanjing 210094,China);Phase-shift interferometry and its application[J];Journal of Applied Optics;2006-02
【Co-citations】
Chinese Journal Full-text Database 10 Hits
1 YAO Wei1,XU Guo-liang1,LI Da-yong2,ZHOU Hai-xian1(1. Institute of Optical Communication Engineering,Nanjing University,Nanjing 210093,CHN;2. Anyang Electric Power Company,Anyang 455000,CHN);New Encoder-decoder Scheme of 2-D OCDMA System[J];Semiconductor Optoelectronics;2009-05
2 RONG Zhang,LIN Shu,HUANG Yan,LI Tao,XU Jing(State Key Laboratory on Integrated Optoelectronics,Department of Electronic Engineering,Tsinghua University,Beijing 100084,CHN);A New Method of Making Fourier Transform Computer-generated Hologram with Visual Angle[J];Semiconductor Optoelectronics;2010-06
3 ZHU Wei-li,ZHANG Ke-ru,BAI Ran,LEI Xian-ming (Department of Physics and Electronic Engineering, Central University for Nationalities, Beijing100081, China);Synthetic Technique for the Making of 3D Sensorimotor Double-Viewpoint Rainbow Hologram[J];Journal of Beijing Institute of Technology;2004-04
4 YU Changsong(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033);Vibration Detection Based on Electronic Speckle Shearing Interferometry[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2011-03
5 HUANG Fang,ZHANG Wenjing,WANG Wensheng(Department of optoelectronics engineering,Changchun University of Science and Technology,Changchun 130022);3D-Deformation Object Testing Base on Speckle Pattern Interferometry[J];Journal of Changchun University of Science and Technology(Natural Science Edition);2012-01
6 YANG Wen-tao,NI Yan-hai,LIANG Yi-ping,DU Liang,WEI Jia-ju,WU Yu(Optical Engineering Key Lab of Chongqing,College of Physics and Electronic Engineering, Chongqing Normal University,Chongqing 400047,China);Research on the Simplified Model for Fine Stripes of Filarnent Piffraction[J];Journal of Chongqing Normal University(Natural Science);2011-04
7 ZHOU Yan,GUO Jun,DONG Hui,WANG Wensheng(Laboratory of Contemporary Optical Measurement Technology,Changchun University ofScience and Technology,Changchun 130022,China);Measurement of In-Plane Displacement Based on Digital Speckle Photography[J];Journal of Test and Measurement Technology;2010-04
8 CHEN Hui-mina,b,GU Hong-boa,ZHANG Wei-yuanc(a.College of Mechanical Engineering;b.Key Laboratory of Textile Science & Technology, Ministry of Education;c.Fashion and Art Design Institute,Donghua University, Shanghai 201620,China);Garment Cloth 3D Non-contact Coordinates Measurement[J];Journal of Donghua University(Natural Science);2011-06
9 CHEN Yi-song,WU Xin-xia(Fashion and Art Design Institute,Donghua University,Shanghai 200051,China);The Dual-Frequency Grating Phase Measuring Profilometry for 3D Human Body Measurement[J];Journal of Donghua University(Natural Science);2011-06
10 JIANG Xiao-jun,LIU Zheng-guo,HONG Xiao-ou,and WANG Zhi-feng (School of Electronic and Electrical Engineering,Shanghai Second Polytechnic University Pudong New District Shanghai 201209);Study on Obtaining the Surface form Deviation of the Plane Optical Element[J];Journal of University of Electronic Science and Technology of China;2010-04
China Proceedings of conference Full-text Database 4 Hits
1 Zhang Yanhua 1 Yuan Zongheng 1,2 Zhang Jianwei 1 (1 School of Electronic Engineering,Guilin University of Electronic Technology,Guilin,541004,China) (2 School of Computer & Information Engneering,Guizhou University for Nationalities,Guiyang,550025,China);Study and analysis of autocorrelation method to process the dichromatic speckle patterns of surface roughness measurement[A];[C];2010
2 WANG Sheng-yun,YANG Hong,ZhANG Mei,ZHEN Xue,SUN Yu-nan (Xi'an Institute of Applied Optics,Xi'an 710065,China);THE CALIBRATION DEVICE FOR WAVEFRONT OF OPTICAL ELEMENT[A];[C];2010
3 Guo Houkun 1,2 Luo Hui 1 Cai Kevin 2 Lin Fengtao 1 (1 East China Jiaotong University,Jiangxi Nanchang China 330013) (2 Kyoritsu Electric Corporation (Canada),Richmond Hill,Ontario,Canada L4B 2N6a);Method of Directional adaptive filter for Fringe Image[A];[C];2010
4 SU Jun-hong, SHI Yi-lei, YANG Li-hong, XU Jun-qi (Xi’an Technological University, Xi’an 710032, China );Method to measurement of the thin film thickness based on phase-shift interferometry[A];[C];2008
【Secondary Citations】
Chinese Journal Full-text Database 10 Hits
1 JIA Shu hai,JIANG Hong, YUE Kai duan,TAN Yu shan (Laser & IR Institute,School of Mechanical Engineering,Xi'an Jiaotong University,Xi'an,710049 China);An Unwrapping Error-correcting Method and Its Application in ESPI[J];SEMICONDUCTOR OPTOELECTRONICS;2000-01
2 Chen Jinbang Zhu Jiazheng Song Dezhen Chen Xingming;SPATIAL SCANNING METHOD AND FFT ALGORITHM FOR ANALYZING INTERFEROGRAM[J];Acta Armamentarii;1989-04
3 HUI Mei1, DENG Nianmao2, WANG Dongsheng1, LI Qingxiang1 (1.Department of Precision Instrument and Mechanics,Tsinghua University,Beijing 100084,China; 2.Xi′an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences,Xi′an 710068,China);Phase Unwrapping Method Based on Jumping Order Estimation[J];Journal of Optoelectronics.laser;2003-07
4 WU Dong~(1,2),ZHU Ri-hong~1,CHEN Lei~1,HE Yong~1,WANG Qing~1,GAO Zhi-shan~1 (1. School of Photoelectric Technology, Nanjing University of Science and Technology, Nanjing 210094, China;2. Zhenjiang Watercraft Institute of PLA, Zhenjiang 212003, China);Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer[J];Optics and Precision Engineering;2003-06
5 LIU Xiao jun 1, CHANG Ming 2, GAO Yong sheng 3, LI Zhu 1 (1. School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China) (2. Department of Mechanical Engineering, Chungyuan Christian Universi;Novel functional phase unwrapping algorithm basing on image analysising[J];OPTICAL TECHNOLOGY;2000-04
6 WU SHUDONG ZHENG HUI (Shanghai Institute of Optics and Fine Mechanics, Academia Sinica);Illterferogram analyses with microcomputer[J];Acta Optica Sinica;1983-09
7 Qian Kemao Miao Hong Wu Xiaoping (Department of Meachanics and Mechanical Engineering, University of Science and Technology of China, Hefei 230027);A Real-Time Polarization Phase Shifting Technique for Dynamic Measurement[J];Acta Optica Sinica;2001-01
8 Xie Mengmeng Jiang Jinhu Yang Yong Cheng Daqing Gong Haohang (Physical Department, College of Science, Suzhou University, Suzhou 215006);Grating Big Shearing Digital Specle Pattern Interferometry[J];Acta Optica Sinica;2001-01
9 Chen Huaixin 1) Sui Zhan 2) Chen Zhenpei 1) An Bo 1) Li Mingzhong 2) 1), Department of Optoelectronics, Sichuan Umiversity, Chengdu 610064 2), Institute of Nuclear Physics and Chemistry, China Academy of Engineering Physics,;Laser Beam Shaping Using Liquid Crystal Spatial Light Modulator[J];Acta Optica Sinica;2001-09
10 Tao Gang Li Xide (Department of Engineering Mechanics, Tsinghua University, Beijing 100084);Phase Map Retrieve with Temporal Speckle Pattern Interferometry[J];Acta Optica Sinica;2001-10
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