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Design and error calibration of a micro-electro-mechanical digital geophone system

DU Min1,2,LI Qiao-yan1,XU Guo-dong1(1.Institute of Disaster-prevention Science and Technology,Sanhe 065201,China; 2.Beijing University of Technology,Beijing 100124,China)  
A new-type seismic geophone,integrating three MEMS aeeelerometers and gyroscopes,was developed.It can provide informations of linear acceleration,linear velocity,angular velocity and vibration displacement with greatly improved performance and efficiency.A new six-position plus rotation calibration scheme for the digital geophone was proposed which utilizes only a single axis turn-table without north reference.The experimental results show that the proposed method improves the measurement precision,and verifies the validity of the silicon MEMS geophone.
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