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《Journal of Zhejiang University(Engineering Science)》 2009-04
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Modeling and simulation of micromachined gyroscope

ZHANG Xia,ZHENG Xu-dong,WANG Hao,JIN Zhong-he (Department of Information Science and Electronic Engineering,Zhejiang University,Hangzhou 310027,China)  
A system level model was built according to the dynamic equation of micromachined gyroscope with electromagnetic driving and capacitive detecting and the transfer functions of the interface circuits on Simulink platform in order to reduce the noise of micromachined gyroscope system and enhance system resolution.Mechanical-thermal noise of sensor,electronic-thermal noise of circuits and coupling effects in sensor were added to the model.Therefore,the model not only could get the functional simulation results of gyroscope system,but also could quantify the effect of each noise source on system performance and find the main noise source under different coupling effects.Simulation results show that capacitance-voltage(CV) conversion circuit was the main noise source when the coupling effects in gyroscope were weak;the band-pass filter of gyroscope self-excitation circuit became the main noise source when the coupling effects were robust.Simulation results were validated with the experiment.
【Fund】: 国家“973”重点基础研究发展规划资助项目(2006CB300405)
【CateGory Index】: V241.5
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4 ZOU Yang;XU Qifeng;Fuzhou University;;Dual-end electrostatic film vibration voltage transformer[J];电力自动化设备;2015-04
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