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《Proceedings of the CSEE》 2007-24
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Research on Iterative Learning Control to Long Stroke Linear Motor

SHI Yang-chun1,ZHOU Yun-fei1,LI Hong1,LI Jie-ming2,HUANG Yong-hong2(1.National NC System Engineering Research Center,Huazhong University of Science & Technology,Wuhan 430074,Hubei Province,China;2.Changsha University of Science & Technology,Changsha 410076,Hunan Province,China)  
An nm-level positioning precision is required in the process of scanning and exposing the wafer stage of lithography.A six degree of freedom(DOF)complex movement system can meet the requirement by using rough movement of long stroke linear motor and tiny movement of short stroke Lorentz motor.In order to reduce the movement scope and acceleration of Lorentz motor,the tracking precision of linear motor must be improved.An open-closed-loop D-type iterative learning controller(ILC)is proposed to improve trajectory-tracking performance of permanent magnet linear synchronous motors(PMLSM).The controller consists of three terms:a PID controller which enhances robustness to disturbances and system parameter variability,a feed-forward compensator which improves the real-time tracking ability and an ILC which generally improves the performance in the repetitive tasks by using the information from previous iterations.The experimental results show that tracking precision of PMLSM can be effectively improved by the scheme.
【Fund】: 国家自然科学基金项目(50245011)~~
【CateGory Index】: TM359.4
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