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《Journal of Chinese Inertial Technology》 2005-06
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Micro-Mechanical Electrostatic Servo Accelerometer Based on Double Fiber Fabry-Perot Interferometers

LI Li,ZHANG Chun-xi,LIN Heng,LIU Hui-lan(Institute of Instrument Science & Opt_electronic Engineering,Beijing University of Aeronautics and Astronautics,Beijing 100083,China)  
The paper describes the design of a novel micro-mechanical electrostatic servo accelerometer based on double fiber Fabry-Perot interferometers.Through modeling and simulation,a resolution of 0.2 μg is obtained.The measurement range of the accelerometer is 0.2 μg~1g
【CateGory Index】: TH744.3
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