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《Journal of Chinese Inertial Technology》 2007-04
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System-level modeling and simulation on silicon MEMS gyroscope

WEN Bai-qian, LIU Jian-ye, LI Rong-bing (Navigation Research Center, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China)  
Based on the principle of Coriolis acceleration sensing and the angular rate measurement, the system-level modeling for MEMS gyroscope behavior is an important method to analyze the behavior of its driving, detections and signal-demodulation, and to improve the system performance. According to the dynamics equation and its formation, the MEMS gyroscope is divided into three parts, that is, driving circuit, sensors, and signal demodulation circuit. A system-level analog behavioral model of MEMS gyroscope was established, and the input angular rate signal was extracted by using the method of correlation detection. The simulation results demonstrate the validity of the designed model. The designed model can be used to analyze the characteristics and performance of MEMS gyroscope.
【Fund】: 航空科学基金资助项目(04D52030)
【CateGory Index】: V241.5;TP391.9
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