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《Journal of Chinese Inertial Technology》 2008-06
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Dual-mass silicon micro-gyroscope

YIN Yong1,WANG Shou-rong1,WANG Cun-chao1,YANG Bo1,SHENG Ping1,TIAN Zhong2 (1. School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;2. Department of Communication,Second Artillery Command College of the Chinese PLA,Wuhan 430012,China)  
Dual-mass silicon micro-machined gyroscopes can effectively eliminate the effect of common mode disturbance caused by axial acceleration,etc. A new dual-mass double-linear vibratory silicon micro-mechanical gyroscope was designed by using structure-decoupled method. Based on the structure and the principle of operation,the driving and sensing modals of this new dual-mass gyro were analyzed in theory by using the simplified dynamic equations. By using the finite element software Ansys,the driving and sensing modals of the gyroscope were numerical simulated. The simulation results show that the structure design can realize the full decoupling of the driving mode and sensing mode. So the simulation results validate the correctness of the design. The frequencies in drive mode and sense modals were also obtained by the simulation. The paper also briefly introduces the gyro's fabrication technology . The circuit was used to test a fabricated gyro sample's driving and sensing frequencies. Because of the processing errors,the frequencies are 1.6% deviation between test results and simulation results. Finally,the rotary table was used to test the gyro's scale factor. The dual-mass silicon micro-gyro's scale factor is 2.518 mV/((°) ?s-1) .
【Fund】: 总装备部“十一五”预研课题资助项目(6922002055)
【CateGory Index】: V241.5
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