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《Journal of Chinese Inertial Technology》 2015-04
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Design and test on quadrature error correction system of dual-mass silicon MEMS gyroscope

CAO Hui-liang;LI Hong-sheng;SHEN Chong;SHI Yun-bo;LIU Jun;YANG Bo;Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China;School of Instrument Science and Engineering, Southeast University;  
The quadrature-coupling stiffness correction method for dual-mass silicon MEMS gyroscope is investigated to reduce the quadrature error's influence and improve the gyro's precision and the finished product rate. Firstly, the unequal reason of the left and right masses' s coupling stiffness is analyzed based on the dual-mass structure, and the quadrature stiffness value is calculated taking into account the phase sensitivity demodulation error which contributes great error and drift to the gyro output. Secondly, a quadrature error correction comb is introduced, and a two-mass quadrature error separate compensation system is proposed. Finally, experiments are conducted to test the gyro performance, which show that the separate correction method has better result compared with the integral correction method, and the parameters are significantly improved after quadrature error correction, in which the bias stability is increased to 24.05(°)/h(1σ) from 540(°)/h, verifying the feasibility and practicality of the proposed method.
【Fund】: 总装预研基金项目(9140A09011313JW06119);; 江苏省科技攻关项目(BE2014003-3);; 国家杰出青年科学基金(51225504);; 国防973(2012CB723404);; 国家自然科学基金委员会;; 中国工程物理研究院联合基金资助(U1230114);; 中北大学校基金
【CateGory Index】: TN96
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