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《Journal of Chinese Inertial Technology》 2015-06
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Impact test and failure analysis of high-range piezo-resistive accelerometer based on Hopkinson bar

SHI Yun-bo;YANG Zhi-cai;WANG Yan-yang;CHEN Yan-xiang;ZHI Dan;Science and Technology on Electronic Test & Measurement Laboratory, North University of China;Key Laboratory of Instrumentation Science & Dynamic Measurement of Education Ministry, North University of China;School of Instrument and Electronics, North University of China;  
In order to guarantee the validity and reliability of high-range accelerometer in the process of impact and reduce its failure probability, a Hopkinson-bar laser shock test was carried out for the measured range of 1.0′10~5g_n micro-accelerometer with four-pole fixed-beam structure. Meanwhile the shockresistibility of accelerometer was studied, and the failure mode and failure mechanism of high-range accelerometer in shock environment were discussed. In the test, 10 accelerometers with the same kind of structure were sampled to conduct the shock test. Test results show that the shock-resistance capability of the micro-accelerometer is 1.3′10~5 g_n. The cantilever fracture, cantilever crack, and wire bond shearing on the beam are the main failure modes of the micro-accelerometer. In the end, the causes of failure mode were analyzed, which show that there are two main factors that cause the fracture and crack of the cantilever: One is the repeating shock tests which lead to micro-structure fatigue failure, the other is the resonance between the sensor chip and the high-frequency signal in the shock test process, which instantly enlarges the overload and leads to the sensor's broken due to micro-structure displacement's out of control. Test results show that the reliability is improved through using several means to improve the structures of the acceleration sensors.
【Fund】: 国家自然科学基金杰出青年(51225504)
【CateGory Index】: TH824.4
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