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Analysis on the Schemes of Electrostatically Force-Balanced Micro Silicon Accelerometer

Guo Xiuzhong; Cheu Jiabin (Nanjing University of Aeronautics and Astronautics)  
Electrostatically force-balanced Micro silicon acceleromter is a new type of accelerometer. Three kinds of typical .schemes of this type of accelerometer are analyzed in this paper. The formulae of electrostatic force(torque), stiffness(angular stiffness ) of electrostatic force balance circuit, measurement range of acceleration are presented. The results presented in this paper can be used as the basis on designing the accelerometer parameters.
【CateGory Index】: TH823.4
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