A Study of Preparation Technologues and Testing Methods of a MicroSilicon Accelerometer
Zhang Yane (Southeast University)
The operation principle, construction design, preparation technologues and testing methods of the microsilicon electrostatically forcebalanced accelerometer with torsional pendulum are introdued in this paper. It has certain reference value for developing microsilicon accelerometer.
【CateGory Index】： TH824.4,