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《Vacuum and Cryogenics》 2003-02
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CHARACTERIZATION OF MICRO-MECHANICAL SILICON ACCELEROMETER

HE Ling, XUE Da\|tong (Lanzhou Institute of Physics, Lanzhou 730000, China)\;\;  
The basical principles and characterizations of micro\|mechanical silicon accelerometer are introduced. The design project of high precision silicon accelerometer is presented by comparing various silicon accelerometers.\;
【CateGory Index】: TH824.4
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