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《Vacuum Science and Technology》 1997-03
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A Novel Silicon Micromechanical Resonant Viscosity Vacuum Gauge

Wang Yaqiang;Jin Zhonghe; Wang Yuelin; Ding Chun(Department of Information and Electronic Engineering, Zhejiang University, Hangzhou, 310027)  
A new type of resonant viscosity vacuum gauge based on the electrostatically excited silicon micromechanical resonant vacuum sensor has been developed,that can measure the pressures over a range from 1Pa to 1. 33 ×103 Pa. The theoretical analysis and the experimental results are presented.
【Fund】: 国家重点自然科学基金!69236022
【CateGory Index】: TB77
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