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《Vacuum Science and Technology》 2003-06
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Growth of Diamond Like Carbon Films by Microwave-Electron-Cyclotron-Resonance-Plasma-Source Ion Implantation

Wang Jingang,Ma Guojia,Deng Xinlu *,Li Xin and Tang Zhenan (State Key Lab for Materials Modification by Electron,Ion,and Laser Beams, Dalian University of Technology,Liaoning,Dalian,116024,China)  
Diamond like carbon(DLC) films were grown on Si(100) substrates by microwave electron cyclotron resonance (ECR) plasma source ion implantation (PSII) with methane as the working gas.The films were characterized with Raman spectroscopy,Fourier transformation infrared spectroscopy(FT IR),atomic force microscopy (AFM) and nano indentation.Influence of gas flux on the film growth was also studied.
【Fund】: 国家自然科学基金重点项目 5 0 13 5 0 40
【CateGory Index】: O484
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【References】
Chinese Journal Full-text Database 2 Hits
1 SANG Li-jun,CHEN Qiang(Beijing Key Laboratory of Plasma Physical and Material,Beijing Institute of Graphic Communication,Beijing 102600,China);Study of Diamond-like Carbon Films Prepared by ECR-RF Dual-Power Source Plasma Chemical Vapor Deposition[J];Packaging Engineering;2008-10
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1 Sang Lijun Chen Qiang Laboratory of Plasma Physical and Material,Beijing Institute of Graphic Commumcation. Beijing 102600,China;Effect of Pulsed Bias on the Structure and Performance of Diamond-like Carbon Films in ECR plasma[A];[C];2008
【Co-references】
Chinese Journal Full-text Database 10 Hits
1 Du Peng,He Jimin(Institute of Plastics Machinery and Engineering,Beijing University of Chemical Technology,Beijing 100029,China);DEVELOPMENT AND PROSPECTS OF BARRIER TECHNOLOGY OF PET BEER BOTTLE[J];Engineering Plastics Application;2006-07
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3 LI Hong-xuan, XU Tao, CHEN Jian-min, ZHOU Hui-di, LIU Hui-wen (State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China);Effects of DC Negative Bias Voltage on the Structure and Properties of Diamond-like Carbon Films[J];Journal of Materials Science and Engineering;2003-06
4 Cheng Yuhang Wu Yiping Chen Jianguo Qiao Xueliang Xie Changsheng (Department of Materials Science and Engineering, Huazhong University of Science and Technology);THE STRUCTURE AND PROPERTIES OF DIAMOND LIKE CARBON FILMS[J];JOURNAL OF THE CHINESE CERAMIC SOCIETY;1997-04
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6 CHENG Yu Hang WU Yi Ping CHEN Jian Guo QIAO Xue Liang XIE Cang Sheng ( Depart of Materials Science and Engineering,Huazhong University of Science and Technology Wuhan 430074 China) XU De Sheng ( State Key Laboratory of Laser;Deposition and Properties of a C:H(N) Films[J];JOURNAL OF INORGANIC MATERIALS;1999-04
7 CHENG SHAN\|HUA\ NING ZHAO\|YUAN\ KAN JIAN MA CHUN\|LAN\ YE CHAO (Department of Physics, Suzhou University, Suzhou\ 215006, China);EFFECTS OF DEPOSITION TEMPERATURE ON ELECTRICAL PROPERTIES OF HYDROGENATED AMORPHOUS CARBON FILMS[J];ACTA PHYSICA SINICA;2000-10
8 GUO DONG CAI KAI LI LONG TU GUI ZHI LUN(Department of Materials Science & Engineering, Tsinghua University, Beijing 100084, China)(Received 21 February 2001; revised manuscript received 6 July 2001);ELECTRODEPOSITION OF DIAMOND-LIKE CARBON FILMS FROM ORGANIC SOLVENTS AND EFFECTS OF ANNEALING ON THE FILM STRUCTURE[J];Acta Physica Sinica;2001-12
9 Yang Wu\|Bao\ Fan Song\|Hua\ Liu Chi\|Zi\ Zhang Gu\|Ling\ Wang Jiu\|Li\ Yang Si\|Ze (Institute of Physics, Chinese Academy of Sciences, Beijing\ 100080, China);Investigation of diamond-like-carbon films deposited on glass substrate by using a pulsed high energy density plasma gun[J];Acta Physica Sinica;2003-01
10 Li Hong-Xuan Xu Tao Chen Jian-Min  Zhou Hui-Di Liu Hui-Wen (State Key Laboratory of Solid Lubrication , Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences, Lanzhou 730000, China);Effect of RF power on the structure and properties of diamond-like carbon films[J];Acta Physica Sinica;2005-04
【Secondary References】
Chinese Journal Full-text Database 1 Hits
1 SANG Lijun CHEN Qiang(Key Laboratory of Beijing for Graphic & Packaging Material and Technology,Beijing Institute of Graphic Communication,Beijing,102600,China);Effect of pulsed bias on structure and tribological performance of diamond-like carbon films[J];Nuclear Techniques;2009-06
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