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《Chinese Journal of Vacuum Science and Technology》 2014-09
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Metalization of Sensitive Ceramics via Magnetron Sputtering

Wang Wenting;Wang Demiao;Department of Information Science & Electronic Engineering,Zhejiang University;R&D Center for Advanced Electronic Equipment,Zhejiang University Kunshan Innovation Institute;Suzhou Advanced Vacuum Electronic Equipment Co.,Ltd.;  
Here,weaddressed the metallization of negative temperature coefficient( NTC) thermal sensitive ceramics.The multilayered Ni /V-Ag thin films,consisting of a Ni-V transition and diffusion barrier layer( 500 nm) and Ag welding layer( 200 nm),were deposited successively on substrate of NTC ceramics by magnetron sputtering.The microstructures and interface adhesion of the multilayers and electrical properties of the NTC ceramics were characterized with scanning electron microscopy,and energy dispersive X-ray spectroscopy.The results show that the Nilayer makes a good Ohmic contact on the NTC ceramics,and significantly strengthens the interfacial adhesion.In addition,the Ni layer ensures a high soldering quality,not only because it effectively prevents Ag from diffusing into bulk ceramics,but also because it has a high temperature corrosion-resistance in no-lead soldering.
【CateGory Index】: O484.1
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