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《Vacuum》 2007-06
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Structural and optical characteristics of TiO_2 thin films doped with Ce_2O_3

WANG Liang,LI Jian,GAO Yan(Department of Physics,College of Sciences of Technology,Inner MongoliaUniversity,Hohhot 010021,China)  
Ce2O3-doped TiO2 thin films were deposited on the glass and monocrystalline silicon substrates through vacuum heat evaporation.The effects of Ce2O3 doping and heat-treatment on the properties of films was studied with XRD and SEM.The results showed that the heat-treatment improves greatly the structural and optical performance of the thin films,while the Ce2O3 doping can lower the transforming temperature of crystal form.The thin film deposited on glass substrate is transformed into rutile structure from anatase when heat-treated at about 600℃.The transformation of crystal form starts when the doped Ce2O3 content is 5at% and heat-treated at about 500℃.The grains on film surfaces are homogenously distributed with pores and particle aggregation found differently.After Ce2O3 doping the surface compactness of thin film increases obviously.The optical band gap of the thin film deposited on glass substrate decreases from 3.74eV to 3.60eV.
【Fund】: 内蒙古自治区自然科学基金项目(200607010109);; 内蒙古自治区高等学校科学研究项目(NJ05030)
【CateGory Index】: O484
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