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Typical properties and preparation technologies of AlN packaging material

WANG Chao,PENG Chao-qun,WANG Ri-chu,YU Kun,LI Chao(School of Materials Science and Engineering,Central South University,Changsha 410083,China)  
AlN is a new packaging material with excellent electrical and thermal mechanical.The typical properties and the heat conduction mechanisms of AlN ceramics were introduced.Five synthesis methods of AlN powder were discussed,namely direct nitrogenation of Al powder,carbothermal reduction of Al2O3,chemical vapor deposition,sol-gel method,self-propagating high-temperature synthesis and plasma chemical synthesis.The choice of AlN sintering additives and five sintering technologies were analysed,namely hot pressing sintering,pressureless sintering,spark plasma sintering,microwave sintering and self-propagating sintering.The preparation processes of AlN substrate and its influencing factors were expounded.
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