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《Micronanoelectronic Technology》 2017-02
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Performance Optimization and Design of the LC Temperature Sensor at High Temperature

Tang Shun;Tan Qiulin;Wang Haixing;Song Ruijia;Wu Guozhu;Xiong Jijun;Science and Technology on Electronic Test and Measurement Laboratory,North University of China;Key Laboratory of Instrumentation Science & Dynamic Measurement of the Ministry of Education,North University of China;  
The reason of the signal strength reduction for the LC temperature sensor in the high temperature environment was studied,and a wireless passive temperature sensor for high temperature environment was designed according to the analysis results.The effect of the parameters variation with the temperature on the quality factor Q was investigated by the modeling analysis,and based on the analysis results,the related parameters were optimized to enhance the signal strength at high temperature.Alumina ceramic was used as the substrate for the sensor,and the LC resonance circuits were fabricated on the substrate by the screen printing technology.Finally,a high temperature test platform was set up to test the high temperature performance of the sensor.The test results show that the sensor can work stably in the high temperature environment up to 900 ℃ with a high signal strength.
【Key Words】: wireless passive LC temperature sensor quality factor high temperature resonant frequency
【Fund】: 国家自然科学基金资助项目(61471324 51425505);; 山西省青年拔尖人才支持计划
【CateGory Index】: TP212
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