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《Acta Armamentarii》 2018-05
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Design and Performance Test of a Novel Piezo-scanning Stage

WANG Geng;WANG Shuai-qi;School of Mechanical and Power Engineering,Henan Polytechnic University;  
A compact piezo-scanning stage based on a novel compound flexible hinge is designed. A kind of flexible drive hinge with two-stage magnification is proposed for piezo-scanning stage. The motion range of its deflection angle is calculated by analytical calculation and finite element analysis,respectively. The structure and working principle of piezo-scanning stage is presented. The deflection angle range and resonant frequency of the stage prototype are tested. A series of experiments for open loop and closed loop controls are conducted to validate the performance of the stage after its deflection angle is calibrated. Experimental results show that the angle resolution of the stage is 1. 5 μrad; better positioning performance can be achieved because the steady-state peak-to-valley error is 4. 2 μrad within ± 3 μrad of the final steady state value when a staircase step signal is positioned by closed loop control; better control effect of deflection angle can be obtained by closed loop control compared with open loop control in quasi-static operation mode,because the closed-loop positioning error is 1. 9% with a significant decline while the open loop error is 25. 0% of the whole range when 1 Hz triangle wave is tracked.
【Fund】: 国家自然科学基金项目(51505133)
【CateGory Index】: TH703
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