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Microstructure and Surface Morphology of LiCoO_2 Thin Film Grown under Different Temperature by Pulsed Laser Deposition

LIU De-sheng1,ZHONG Shu-ying2,JIANG Di-you3,DU Yan-lan2,HU Jun-ping2,YE Zhi-qing2,LEI Min-sheng2(1.Nanchang Gampus,Jiangxi University of Science and Technology,Nanchang 330013,China;2.College of Physics and Communication Electronics,Jiangxi Normal University,Nanchang 330022,China;3.Department of Materials Science Jiangxi Blue Sky University,Nanchang 330098,China)  
LiCoO2 thin film samples have been prepared on monocrystal Si(100) by pulsed laser deposition(PLD) under different substrate temperature.The microstructure and surface morphology of the samples were analyzed by the technique of X-ray diffraction(XRD) and scanning electron microscope(SEM) respectively.The results reveal that distinct influence appear at the microstructure and surface morphology of the LiCoO2 thin films prepared by PLD under different substrate temperature.The samples grown above 500 ℃ display fine crystalline quality;the higher substrate temperature incline to develop the bigger grain size of the thin films.
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