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《Journal of Chongqing University of Technology(Natural Science)》 2011-01
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Effects of Preparation Parameters on the Optical Constants of TbFeCo/Si

ZHANG Yonga,ZHANG Jin-minb,TIAN Huab(a.College of Science and Technology;b.College of Science,Guizhou University,Guiyang 550004,China)  
In this paper,the technology of fabrication of TbFeCo/Si,Ag/TbFeCo/Si films by magnetron sputtering system were thoroughly investigated.First,the growth mechanism,the optical property,the megtronic property and the magnet-optical property of TbFeCo were analyzed.The results showed that different sputtering pressures had different influences on components of TbFeCo film,and it was found that the appropriate pressure was 2.0 pa.Second,the optical properties of the TbFeCo films were investigated in the photon energy range of 1.5-4.5 eV using Spectroscopic Ellipsometry,and the impact of the fabrication on the optical properties of the TbFeCo/Si were analyzed.The results showed that with the change of sputtering pressures,power and Ar flux,the film properties differ significantly.Finally,the megtronic property and the magnet-optical property of Ag/TbFeCo/Si and TbFeCo/Si films were analyzed.The results showed that Ag films have significant impact on the magnet-optical property of TbFeCo.
【Fund】: 贵州省贵阳市科技局大学生创业基金资助项目([2007]筑科计合同字第6-2号);; 贵州省教育厅大学生创业基金资助项目(701059101) 贵州省科技厅自然科学基金资助项目(20033059) 贵州省教育厅自然科学基金资助项目(2003315)
【CateGory Index】: O484.4
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