Development of SOG Piezoresistive Pressure Sensors
Lin Hai'an Zhang Jiawei Cheng Jian Huang Minchen (Dpt. of Electronic Eng., Southeast Univ.) (Huajing Electronics Group Corporation, Wuxi)
In this paper, a new pressure sensor, using glass film as isolation layer, is developmented. The bonding of SOG (Silicon On Glass) material and the thinning based on etching self-stop method are researched. It is considerable that SOG sensor can potentially be used in the range of high temperature and large pressure.