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《Chinese Journal of Sensors and Actuators》 2013-01
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The Parasitic Capacitance's Influence on Noise in a MEMS Accelerometer Sensor

ZHU Zhongyi,LIU Yidong,JIN Zhonghe*(Micro-Satellite Research Center,Zhejiang University,Hangzhou 310027,China)  
This paper mainly analyzes the influence on noise of the parasitic capacitance between the fixed parallel electrodes in a variable-area type MEMS accelerometer sensor.An electromagnetic simulation model is built.The noise formula is derived and it is verified by experiment.The simulation results indicate that the glass substrate under the parallel electrodes can increase the capacitance.The experiment results show that the parasitic capacitance will raise the noise by 60% or more.
【Fund】: 中央高校基本科研业务费专项资金资助(2012QNA4021)
【CateGory Index】: TH824.4
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