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《Chinese Journal of Sensors and Actuators》 2013-01
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The Design and Research of Encapsulation on MEMS Bionic Vector Hydrophone

LI Zhen1,2,ZHANG Guojun1,2*,XUE Chenyang1,2,XUE Nan1,LIU Hong1,CHEN Guiying1(1.Key Laboratory of Instrumentation Science & Dynamic Measurement,Ministry of Education,Taiyuan 030051,China; 2.Science and Technology on Electronic Test & Measurement Laboratory North University of China,Taiyuan 030051,China)  
Three encapsulation structures were designed to package the vector hydrophone,which imitated the fish lateral line cells.those were,the encapsulation of sound-transparent cap made by polyurethane material,and the encapsulation of a sound-transparent cap with caged supporting body,and the encapsulation of a sound-transparent cap with petaloid supporting body.This paper simulated these encapsulation models by ANSYS and concluded that the resonance frequency is respectively 875 Hz and 2 926 Hz and 3 006 Hz.Finally,three vector hydrophones with these encapsulation structure ware simulated by Virtual.lab acoustic and fabricated and tested.Results show that bandwidth response of encapsulation structure with supporting body is wider around 2.2 kHz than a single sound-transparent cap encapsulation,and the petaloid supporting body has a cumulative effect,which sensitivity with this encapsulation model is higher 8 dB~12 dB than others at the same frequency point.
【Fund】: 国家“863”计划项目(2011AA040404);; 国家自然科学基金项目(51205374);国家自然科学基金项目(61127008)
【CateGory Index】: TB565.1
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