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《Chinese Journal of Sensors and Actuators》 2013-01
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The Research of the CMOS-Compatible Pirani Sensor

WANG Jiaqi*,TANG Zhen ' an(Institute of Semiconductor Technology,College of Electronic Science and Technology,Dalian University of Technology,Dalian Liaoning 116024,China)  
The Pirani sensor is widely used in rough vacuum measurement.This paper reports a Pirani sensor fabricated in a standard CMOS process based on the Pirani sensor fabricated by MEMS technology.The tungsten microhotplate is adopted as the sensory component and the constant current circuit is used to bias the tungsten microhotplate to measure the gas pressure.The sensor fabricated with the 0.5 μm standard CMOS process shows a response to the gas pressure from 10-1 Pa to 105 Pa.What is more,it has the linear response to the gas pressure in the range from 1 Pa to 100 Pa.
【Fund】: 国家自然科学基金项目(61201035 61131004);; 中央高校基本科研业务费专项资金项目
【CateGory Index】: TP212.1
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【Citations】
Chinese Journal Full-text Database 2 Hits
1 ZHOU Ji-long,CHEN Ken-le,ZHANG Jin-wen,JIN Yu-feng National Key Laboratory of Micro/Nano Fabrication Technology,Institute of Microelectronics,Peking University,Beijing 100871,China;Research on Micromachined Pirani Gauge[J];Chinese Journal of Sensors and Actuators;2008-03
2 WANG Jia-qi,TANG Zhen-an*(Department of Electronic Engineering,Dalian University of Technology,Dalian Liaoning 116024,China);CMOS Compatible Tungsten Micro-Hotplate[J];Chinese Journal of Sensors and Actuators;2009-01
【Co-citations】
Chinese Journal Full-text Database 3 Hits
1 CAO Xinliang1,2,YU Ningmei1,WEI Qinxiao11.School of automation Information Engineering,Xi'an University of Technology,Xi'an 710048,China;2.School of Physics and Electronics Information,Yan'an University,Yan'an 716000,China;Achievement and Test on the Integrated CMOS Temperature Sensor[J];Chinese Journal of Sensors and Actuators;2010-01
2 LIU Chuan~1 WANG Xue-Fang~2 LUO Xiao-Bing~(1,2) (1.School of Energy and Power,Huazhong University of Science and Technology,Wuhan 430074,China; 2.MOEMS Division,Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China);Research on Micro Vacuum Measurement Device Based on Heat Transfer Principle[J];Journal of Engineering Thermophysics;2011-09
3 LIANG Ping,LI Jie,DAI Jia-xin,GAN Shu-yi(Department of Vacuum Science and Equipment School of Machical and Automobile Engineering, Hefei University of Technology,Hefei 230009,China);REVIEW AND TREND ON THE DEVELOPMENT OF VACUUM GAUGE[J];Vacuum and Cryogenics;2011-01
【Secondary Citations】
Chinese Journal Full-text Database 2 Hits
1 Lü Pin1,2,TANG Zhen-an1,WEI Guang-fen11.Department of Electronic Engineering,Dalian University of Technology,Dalian 116024,China;2.Physics Institute,Liaoning University Shenyan 110036,China;Recognizing VOCs with Micro-GAS Sensor Array and Neural Network[J];Chinese Journal of Sensors and Actuators;2007-08
2 Deng Dongquan, Xu Lie, Sun Hen, Xiao Youming, Zhu Hongmei (Shanghai Jiaotong University, 200030);Heat Transfer at Gas-solid Interface Under the Condition of Vacuum[J];Cryogenics and Superconductivity;2002-02
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