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《Chinese Journal of Sensors and Actuators》 2013-01
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Parameter Estimation Algorithm Simulation Research of Multi-Wavelength Fringing Electric Field Sensor

HUANG Yunzhi*,ZHANG Huifeng,WANG Beibei(School of Electrical Engineering and Automation,Hefei University of Technology,Hefei 230009,China)  
Multi-wavelength fringing electric field sensors have been widely used in industry process control for property measurement of the multilayer material.The key point of parameter estimation algorithm lies in how the relationship between the sensor output and multilayer properties is constructed.The paper focuses on the three-wavelength interdigital sensor.The nonlinear regression model is constructed based on the 3D finite element simulation,which describe the relationship between the multilayer material dielectric property.The experiments of parameter estimation are done,the results show that the algorithm is effective.
【Fund】: 国家自然科学基金项目(51007016);; 教育部留学回国人员启动基金项目;; 安徽省科技攻关项目(12010302059)
【CateGory Index】: TP212.1
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