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《Chinese Journal of Sensors and Actuators》 2018-06
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NO_2 Gas Sensor Based on Al N Ceramic Micro-Hotplate

WANG Xin;ZHAO Wenjie;ZHANG Fujun;WANG Xuan;SHI Yunbo;The Higher Educational Key Laboratory for Measuring and Control Technology and Instrumentations of Heilongjiang Province,Harbin University of Science and Technology;State Key Laboratory Breeding Base of Dielectrics Engineering,Harbin University of Science and Technology;  
Due to the disadvantages of poor stability and complex process of conventional Si-based micro hotplate gas sensors,NO_2 micro hotplate gas sensors,using Al N ceramic with good thermal conductivity as substrate and In_2O_3/Nb_2O_5/Pt thick film as sensing materials,was designed and prepared by flexible mechanical lift-off techniques. The thermal isolation structure was designed around the middle heating zone of the sensor in order to reduce the gradient of temperature distribution and improve the temperature efficiency. Thermal structural simulations and gas responses of the sensors were carried out by using ANSYS finite element software. The testing results show that the sensors exhibit a good gas response to NO_2 gas in the gas concentration range of 5 × 10~(-6)~ 100 × 10~(-6) under different heating power. The optimal stability was obtained at the heating power of 50 mW ~ 200 mW with a response rate less than 60 s and a recovery time of approximately 100 s.
【Fund】: 国家自然科学青年基金项目(61501149);; 中国博士后基金项目(2016M601437);; 黑龙江省教育厅科技项目(12541141)
【CateGory Index】: TP212
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