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《Chinese Journal of Sensors and Actuators》 2018-06
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Improved Calibration System of Micro-Cantilever Spring Constant

GENG Xinyu;SONG Yunpeng;FU Xing;WU Sen;State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University;  
Microcantilever is the key component of force sensor in AFM. The prerequisite for the accurate quantification of the micro-force is the traceable and accurate measurement of the normal and lateral spring constant of the microcantilever. Due to the limitation of microelectronics processing technology,the dimension parameters and the normal spring constant of the microcantilever cannot be accurately calibrated. Meanwhile the lateral spring constant is lack of widely accepted calibration methods. The calibration system was improved based on the balance method. The combination of the ultra-precision electromagnetic balance and the optical lever structure fulfills the accurate measurement of the bending displacement and the force of the microcantilever and improves the accuracy of the normal spring constant. Microplate samples and inclined loading methods were designed to realize the indirect measurement of the lateral spring constant.Three commercial microcantilevers were calibrated respectively,and the dimension parameter method based on SEM was used as a comparison. The experimental results have good repeatability and small relative deviations. It indicates that the calibration system and method could be used as a reference for the calibration of the spring constants of microcantilevers.
【Fund】: 国家自然科学基金项目(61204117)
【CateGory Index】: TH742
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