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《Transducer and Microsystem Technologies》 2011-09
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A novel MEMS temperature sensor

SHI Zi-qing1,CHEN Xiang-dong1,GONG Jing1,LI Xiu-mei2(1.School of Information Science & Technology,Southwest Jiaotong University,Chengdu 610031,China; 2.School of Physical Science and Technology,Southwest Jiaotong University,Chengdu 610031,China)  
A novel MEMS temperature sensor employing a bi-layer film structure is presented.The sensing unit is composed of a silicon micro-bridge embedded with a piezoresistive Wheatstone bridge and a temperature sensitive polymer film.Model analysis of the temperature sensor using elastic mechanics theory is presented.Analysis shows that the output of the silicon micro-bridge is linear with temperature.Larger area and thicker thickness can improve the performance when the polymer film material parameters are known.
【Fund】: 国家自然科学基金资助项目(60871024);; 国家重点实验室开放课题(KFJJ200915)
【CateGory Index】: TP212.11
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