Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Transducer and Microsystem Technologies》 2011-09
Add to Favorite Get Latest Update

A novel MEMS temperature sensor

SHI Zi-qing1,CHEN Xiang-dong1,GONG Jing1,LI Xiu-mei2(1.School of Information Science & Technology,Southwest Jiaotong University,Chengdu 610031,China; 2.School of Physical Science and Technology,Southwest Jiaotong University,Chengdu 610031,China)  
A novel MEMS temperature sensor employing a bi-layer film structure is presented.The sensing unit is composed of a silicon micro-bridge embedded with a piezoresistive Wheatstone bridge and a temperature sensitive polymer film.Model analysis of the temperature sensor using elastic mechanics theory is presented.Analysis shows that the output of the silicon micro-bridge is linear with temperature.Larger area and thicker thickness can improve the performance when the polymer film material parameters are known.
【Fund】: 国家自然科学基金资助项目(60871024);; 国家重点实验室开放课题(KFJJ200915)
【CateGory Index】: TP212.11
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
【Citations】
Chinese Journal Full-text Database 4 Hits
1 ;Modeling the Stress Calculation of the Diffusion Silicon Pressure Sensor[J];Sensor World;2004-01
2 ;MEMS Pressure Sensor Principle and Application[J];Electronic Engineering & Product World;2009-06
3 Lu Ting-ting,Qin Ming,Huang Qing-an (Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096);The Design of A Novel MEMS Temperature Sensor[J];Journal of Functional Materials and Devices;2008-01
4 Han Jianqiang Zhu Changchun Liu Junhua Wei Peiyong (Xi'an Jiaotong Univ., Xi'an 710049, China);A Si/SiO_2 Bi-layer Microcantilever Temperature Sensor[J];Chinese Journal of Scientific Instrument;2003-05
【Secondary Citations】
Chinese Journal Full-text Database 2 Hits
1 REN Junguo , WANG Hongye , OUYANG Yong (Dept. of Aerospace Technology & Materials Engineering, NUDT, Changsha, 410073 P.R.China);Finite Element Analysis of Flat Diaphragm Pressure Sensor[J];Journal of Transcluction Technology;2001-02
2 Yan Chongguang(East China Electronic Instruments Factory);XSY Series Remote Transmission Digital Manometers[J];Journal of Transducer Technology;1990-01
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved