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《Materials Review》 2005-04
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Sensitive Functional Films of Thin-Film Temperature Sensors

WANG Xiaojun LI Yibing ZHOU Jicheng (School of Physics,Central South University,Changsha 410083)  
The current status and prospect of sensitive functional films in thin-film temperature sensors are introduced,including fabrication technologies,classification,structure,property and so on.Some new promising tem- perature sensitive films,especially metal sensitive functional films are discussed,and the development status of thin- film high temperature sensors are also introduced in detail.Moreover,the technical problems in this field are discussed in this short review.
【Fund】: 国家自然科学基金(60171043;60371046)
【CateGory Index】: TB383.2
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