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《Materials Review》 2006-01
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Effects of Different Concentrations of Precursor Solution on the Property of ZnO Films Prepared by Ultrasonic Spray Pyrolysis Method

ZHOU Jia, HAN Gaorong,LI Minrui (State Key Laboratory of Silicon Materials Science, Zhejiang University, Hangzhou 310027)  
ZnO thin films were grown on the heated glass substrate by the ultrasonic spray pyrolysis method, zinc acetate solutions were used as the precursor material. The crystalline and microstructure of the thin films prepared through different concentrations of precursor solutions have been carefully analyzed. The results show that the ZnO thin films exhibit the hexagonal wurtzite polycrystalline structure. Samples that grown in suitable conditions have the dense smooth and homogenous structure and exhibit the preferential orientation of (002) to the substrate surface. And these films have a high visible transmittance of above 80%.
【Fund】: 国家高技术研究发展计划(863计划)资助项目(2001AA320202)
【CateGory Index】: TN304
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