Numerical Simulation of Electromagnetic Fields of MPCVD Resonance Cavity
LIU Fan,WANG Jianhua (School of Material Science and Engineering, Wuhan Institute of Technology, Key Laboratory of Plasma Chemical and Advanced Materials of Hubei Province, Wuhan 430073)
Based on the finite difference time domain method (FDTD), the distribution of the electromagnetic field for a given resonance cavity is numerically calculated. A mathematical model, which is based on the Maxwell Equation, is deduced to describe the electromagnetic field distribution of the cavity. The electromagnetic field distribution in the microwave resonance cavity is analyzed with Ansoft software. The properties of the cavity are judged according to the distribution of the electromagnetic field. The simulation results show that there are three even electric field regions, with the same size, in the empty cylinder microwave resonance, and that the cavity has a high quality. The numerical simulation results are in accordance with the experimental results.
【CateGory Index】： TN60