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《Materials Review》 2007-S2
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Study of Internal Stress and Film Growth of Diamond Films by Hot Filament Chemical Vapor Deposition

XING Wenjuan,WANG Jianhua,WANG Chuanxin (Provincial Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan 430073)  
Diamond films are deposited on tungsten carbide YG6 by hot filament chemical vapor deposition. A study is presented on effect of the growth orientation and internal stress in diamond coatings, which are affected by the distance between hot filament and substrate, and negative bia-voltage. The results show that when the distance between the substrate and hot filament ranges from 4.0mm to 8.5mm, the morphology of diamond fihns mainly display a(111) face orientation. The internal stress reduces gradually with increasing distance, and the lowest internal stress is achieved at the distance of 8.0mm. When the substrate temperature is above 800℃, the internal stress improves with increasing temperature, which leads to a decrease in the adhesion of diamond films on cemented carbide.
【Fund】: 湖北省科技攻关计划支持(项目编号2002AA105A02);; 湖北省教育厅2004年创新团队项目支持
【CateGory Index】: TB383.2
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