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《Materials Review》 2018-S1
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Study on Preparation and Properties of Superconducting Niobium Films by Pulsed Laser Deposition

PENG Mingdi;LU Weier;XIA Yang;WANG Tong;ZHAO Lili;LI Nan;Electronic Equipment and Equipment Center,Institute of Microelectronics,Chinese Academy of Sciences;College of Science,Beijing Jiaotong University;Key Laboratory of Microelectronic Devices and Integration Technology,Institute of Microelectronics,Chinese Academy of Sciences;Beijing Key Laboratory of IC Test Technology;  
The Nb thin films were prepared on silicon substrates through pulsed laser deposition.The films were characterized by X-ray diffraction(XRD),scanning electron microscopy(SEM),high-resolution X-ray photoelectron spectroscopy(XPS),and physical property measurement system(PPMS).The effects of different laser energies,target and substrate distances and substrate temperatures on the crystal structure,surface morphology and electrical properties of the obtained Nb thin films were investigated.It was supported that with the increasing of the laser energy,the crystallinity of the film was improved.The suitable distances and substrate temperatures were beneficial to improve the crystallinity property of the Nb film.When the laser energy was 280 mJ,the target and substrate distance was 5 cm and the heating temperature was 650℃,the Nb film had the half width of 0.39°at(110)crystal face and minimum resistivity and the superconducting transition temperature(Tc)was 8.6 K.
【Fund】: 国家自然科学基金青年基金(61604175;61404170)
【CateGory Index】: TB383.2;TG146.416
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