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《Materials Review》 2018-S1
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Recent Progress and Synthesis of Ternary Metal Nitride Thin Film by Sol-gel Method

MA Qin;WANYAN Shaojun;ZHU Xuebin;HUO Zhaoyan;HAN Li;State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals,School of Materials Science and Engineering,Lanzhou University of Technology;Institute of Solid State Physics,Chinese Academy of Sciences;  
Ternary metal nitride films are a new class of materials with a wide range of applications in the fields of electronics,ferromagnetism,etc.There are mainly two types of structures,cubic metal(trans)perovskite and cubicη-carbide,due to their excellent properties such as high hardness,superconductivity,catalytic properties and various magnetic properties have led to extensive research.This article mainly describes the ternary nitride structure properties and the application of sol-gel method on the preparation of these nitrides.It also describes and analyzes the advantages and disadvantages of gol-gel method;and briefly describes the preparation of other ternary metal nitrides via sol-gel method on applications such as ferromagnetic thin films.Finally,the prospect of sol-gel methods and their current problems are pointed out.
【CateGory Index】: TB383.2
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