Full-Text Search:
Home|Journal Papers|About CNKI|User Service|FAQ|Contact Us|中文
《Journal of Northeast Normal University (Natural Science Edition)》 2005-01
Add to Favorite Get Latest Update

Compositional and structural properties of TiO_(2-x)N_x thin films deposited by RF magnetron sputtering

JING Shi-wei~(1,2),LIU Yi-chun~(1,2),LIANG Yu~2,MA Jian-gang~2, Lü You-ming~2,SHEN De-zhen~2,ZHANG Ji-ying~2,FAN Xi-wu~2 (1.Center for Advanced Opto-Electronic Functional Material Research, Northeast Normal University, Changchun 130024, China; f Sciences;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China)  
TiO_(2-x)N_x thin films were deposited onto Si(100) and quartz substrates by radio frequency (RF) magnetron sputtering method using a titanium metal disk as a target in Ar, N_2, and O_2 atmospheres. The substrate temperature was kept at 300 ℃. The O_2 and Ar gas flow rates were kept constant and N gas flow rate was varied. TiO_(2-x)N_(x) films with different N content were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. The results indicated that high-quality TiO_(2-x)N_x thin films were obtained at N_2 / (Ar + O_2 + N_2) = 13% and 17%. In terms of the results of X-ray photoelectron spectroscopy, N _(1s)of β-N (396 eV) was the main component in the TiO_(2-x)N_x thin films. Because the energy level of β-N was positioned above the Valence-Band Maximum (VBM) of TiO_2, an effective optical-energy gap decreased, which was verified by the optical-absorption spectra. Because TiO_(2-x)N_x thin films had a relatively small gap compared with TiO_2, and β-N was the active site for the photocatalyst under visible light, so that TiO_(2-x)N_x thin films could be applied on more extensive areas as the photocatalyst to provide more catalytic activity.
【Fund】: 国家自然科学基金资助项目(60176003);; 教育部优秀青年教师基金项目;; 教育部跨世纪优秀人才项目;; 东北师范大学校内青年基金项目
【CateGory Index】: TN304
Download(CAJ format) Download(PDF format)
CAJViewer7.0 supports all the CNKI file formats; AdobeReader only supports the PDF format.
Chinese Journal Full-text Database 2 Hits
1 YANG Jinghai1,2,GONG Jie1,2,WANG Chunzhong2,WANG Yaxin1,ZONG Zhanguo1(1.Institute of Condensed State Physics, Jilin Normal University, Siping 136000,China;2.Faculty of Materials Science, Jilin University, Changchun 130023,China);Preparation and structure study for spinel LiMn_2O_4[J];Journal of Northeast Normal University (Natural Science Edition);2003-01
2 DONG Guo-chen,ZHANG Rong-chang,ZHAN Rui-rui,ZHAN Yong-fu (Teacher's Science College of Beihua University, Jilin 132013,China);Preparation and characterisation on SO_4~(2-)/TiO_2-SiO_2 nanosolid superacid systems[J];Journal of Northeast Normal University (Natural Science Edition);2004-02
Chinese Journal Full-text Database 10 Hits
1 HAO Jie,ZHOU De-feng,MA Yue,XIE Hai-Ming,SU Zhong-min,WANG Rong-shun (Faculty of Chemistry,Northeast Normal University,Changchun 130024,China);Study on anode materials prepared from rice husks for lithium ion batteries[J];Journal of Northeast Normal University (Natural Science Edition);2005-01
2 HUANG Xiao-wen~(1,2), SHI Peng-fei~1(1.Department of Applied Chemistry, Harbin Institute of Technology, Harbin 150001, China;2.Changchun Institute of Applied Chemistry,Chinese Academy of Science,Changchun 130022,China);A new type of electric double-layer capacitors prepared and study on electrochemical properties[J];Journal of Northeast Normal University (Natural Science Edition);2005-03
3 XI Hong-min~(1,2),ZHAN Rui-rui~2,ZOU Xian-zhi~2,ZHAN Yong-fu~2,ZHANG Rong-chang~2(1.College of Geoexploration Science and Technology,Jilin University,Changchun 130026,China;2.Department of Chemistry,College of Science,Beihua University,Changchun 132013,China);Research in modification of S_2O~(2-)_8/ZrO_2 nanosolid superacid systems[J];Journal of Northeast Normal University;2006-03
4 ZHANG Rong-chang,ZHAN Rui-rui,DONG Guo-chen,XI Hong-min(Department of Chemitry Teacher's Science College,Beihua University,Jilin 132013,China);Synthesis of cyclohexyl acetate using nano solid superacid S_2O_8~(2-)/ZrO_2-Fe_2O_3-SiO_2[J];Journal of Northeast Normal University(Natural Science Edition);2007-02
5 CAI Jian-yan1,LI Ping2,LU Sa2,SUN Wen-dong2(1.Biological Science and Technology College,Changchun University,Changchun 130022,China;2.Faculty of Chemistry,Northeast Normal University,Changchun 130024,China);Synthesis of WO_3/ZrO_2 by microemulsion and solvothermal and application in isobutane/butene alkylation[J];Journal of Northeast Normal University(Natural Science Edition);2007-03
6 Xing Chunli Cheng Zhansheng Qu Juping (Department of Biological and Chemical and Environmental Engineering,Jiaozuo University,Jiaozuo 454003,China);Synthesis of Dioctyl Adipate Catalyzed by Magnetic Nanometer-Sized Solid Superacids[J];Chemical Reaction Engineering and Technology;2005-03
7 SHI Xiang-yu,WANG Yong-jun(Department of Biochemical and Environmental Engineering,Jiaozuo University,Jiaozuo 454003,Henan Province,China);Magnetic nanometer-sized solid superacids for catalytic synthesis of dioctyl adipate[J];Chemical Engineering;2006-06
8 Shu Hua Guo Haifu Wu Wensheng Wu Yanni Yan Peng(College of Chemistry & Chemical Engineering Zhaoqing College,Zhaoqing 526061,Guangdong,China);STUDIES ON PREPARATION AND REGENERATION OF THE NOVEL RARE-EARTH SOLID SUPER-ACID S_2O_8~(2-)/Sb_2O_3/La~(3+)CATALYST[J];Speciality Petrochemicals;2008-05
9 CHANG Yan-hong,LIU Liu (Department of Life Science and Chemistry,Tianshui Normal College,Tianshui 741000,China);Study on Catalytic Synthesis of Dimethyl Fumarate by Nanosolid Superacid SO_4~(2-)/TiO_2[J];Liaoning Chemical Industry;2006-08
10 WANG Shao-jin,ZHU Qing,ZHANG Tao,ZHENG Hai-tao(School of Material Science and Chemical Engineering,Tianjin Polytechnic University,Tianjin 300160,China);Synthesis of n-Butylacetate with SO_4~(2-)/TiO_2-Hβ Solid Superacid Catalyst[J];Liaoning Chemical Industry;2007-06
Chinese Journal Full-text Database 10 Hits
1 ZHANG Li 1,2, CHU Dao-bao 1 (1. College of Chemistry and Materials Science ,Anhui Normal University, Wuhu 241000,China; 2. Suzhou Teachers' College, Suzhou 234000, China);THE INFLUENCE OF ACIDITY ON THE PREPARING OF TiO_2 NANOPARTICLES FROM H_2 TiO_3 WITH HYDROTHERMAL METHOD[J];Journal of Anhui Normal University(Natural Science);2002-01
2 LI Weihua\ HAO Yanzhong\ WANG Yanqin\ QIAO Xuebing YANG Maizhi\ CAI Shengmin (College of Chemistry and Molecular Engineering,Peking University,Beijing,100871);A Photoelectrochemistry Study of Nanocrystalline ZnO Nanoporous Film Electrodes Co sensitized by CdS/Ru(Ⅱ) Complex[J];ACTA SCICENTIARUM NATURALUM UNIVERSITIS PEKINESIS;1999-04
3 Zhang Feng, Li Qinglin (Lanzhou Institute of Chemical Physics, The Chinese Academy of Sciences, Lanzhou 730000) Yang Jianjun, Zhang Zhijun (Lubrication and Functional Material Key Laboratory, Henan University, Kaifeng 475001);STUDY OF VISIBLE SPECTRAL SENSITIZATION OF NANOCRYSTALLINE TiO 2 PHOTOCATALYST[J];CHINESE JOURNAL OF CATALYSIS;1999-03
4 JIAN Panming 1* , XIA Yamu 2, LI Dehong 3, WANG Xiaoyan 1 (1 Department of Chemistry and Chemical Engineering, College of Science, Yangzhou University, Yangzhou 225002, China; 2 College of Chemistry and Chemical Engineering, Lanzhou University, L;Preparation, Characterization and Photocatalytic Activity of Doped TiO_2 Nanopowders[J];Chinese Journal of Catalysis;2001-02
5 PENG Feng , REN Yanqun(Department of Chemical Engineering,South China University of Technology, Guangzhou 510640, Guangdong, China);Preparation of Nano-TiO_2-SnO_2 Composite Film and Its Photocatalytic Activity for Toluene Degradation[J];Chinese Journal of Catalysis;2003-04
6 Mei Yan1,2, Jia Zhenbin2, Qiu Li2, Cao Jianglin2, Zhang Yanfeng2, Wei Yu2(1. Xingtai College, Xingtai 054001, China)(2. Hebei Normal University, Shijiazhuang 050016, China);Study of Supporttype TiO_2 Nanofilm Electrode Photo- electrocatalyst Oxidation Methanol[J];Rare Metal Materials and Engineering;2003-08
7 Chu DaoBao * Zhou Xingfu (Inst.of Org.Chem.,Anhui Normal Univ.,Wuhu 241000) Lin Changjian Tang Jianguang (Dept.Mat.Sci.,Dept.Chem.,State Key Lab.for Phy.Chem.of Solid Surf., Xiamen Univ.,Xiamen 361005);Prparation of Nanocrystaline TiO_2(Anatase)with High Thermal and Textural Sability by Electrochemical Method[J];ELECTROCHEMISTRY;1999-04
8 CHU Dao_bao 1,SHEN Guang_xia 1,ZHOU Xing_fu 1, LIN Chang_jian 2,LIN Hua_shui 2 (1. Inst.of Organ.Chem.,Anhui Normal Univ.,Wuhu 241000,China;2.Dept.of Mater.Sci., State Key Lab.for Phys.Chem.of Solid Surface,Xiamen Univ.Xiamen 361005,China);Preparation of Ti-Based Nanocrystalline TiO_2 Film Electrode with High Activity[J];Electrochemistry;2001-02
9 GAO Wei 1, WU Feng Qing 1* , LUO Zhen 1, FU Ju Xia 1, WANG De Jun 1, XU Bao Kun 2 (1. Department of Chemistry, Jilin University; 2. Department of Electronic Egineering, Jilin University, Changchun 130023, China);Studies on the Relationship Between the Crystal Form of TiO_2 and Its Photocatalyzing Degradation Efficiency[J];Chemical Research In Chinese Universities;2001-04
10 ZHU Lian Jie, WANG De Jun *, XIE Teng Feng (Department of Chemistry, Jilin University, Changchun 130023, China) SHANG Jing, XU Zi Li, DU Yao Guo (Department of Environmental Science and Engineering, Jilin University, Changchun 130023, China);Researches on Photocatalytic Activities and Photovoltaic Properties of TiO_2 Nanoparticles[J];Chemical Research In Chinese Universities;2001-05
【Secondary Citations】
Chinese Journal Full-text Database 6 Hits
1 Li Bao, Zhan Yong-fu, Li Lian-zhong and Zhang Xiao-mei (Department of Chemistry, Jilin Teachers College, Jilin);Zr(SO_4)_2·4H_2O AS CATALYST FOR ESTERIFICATION[J];Chinese Journal of Catalysis;1989-03
2 SUN Wendong1,SHI Wei1,ZHAO Zhenbo2,WU Yue2(1Faculty of Chemistry,Northeast Normal University,Changchun 130024,China;2Changchun Institute of Applied Chemistry ,The Chinese Academy of Sciences,Changchun 130022,China);Study of isobutane-butens alkylation on Hβ molecular sieve strong acid loaded with alkali metal and rare earth metal[J];Journal of Northeast Normal University (Natural Science Edition);2003-03
3 C.Bellitto (Institute of Chemical Materiais,CNR,00016,Rome,Italy)Peng Jun; Wang Enbo(Department of Chemistry,Northeast Normal University,Changchun,130024);Systematic Studies of Charge-transfer Polyoxometallates( Ⅰ) Synthesis and Characterization of Keggin Polyoxometallates[J];JOURNAL OF NORTHEAST NORMAL UNIVERSITY (NATURAL SCIENCE EDITION);1996-03
4 JIANG Jing jie 1,ZHAI Xiu jing 2,GAO Hong 2 (1.Department of Chemistry, Harbin Normal University, Harbin 150080, China; 2.College of Material and Metallurgy, Northeast University, Shenyang 110006, China);The studies of structure and properties on new battery materials LiNi_yCo_zTi_(1-y-z)O_2[J];JOURNAL FO MOLECULAR SCIENCE;2000-01
5 ZHANG Rong chang 1, FAN Ying jie 2, ZHAN Rui rui 1, ZHAN Yong fu 1 (1.Teacher's Science College of Beihua University,Jilin 132000,China; 2.Institute of Jilin Petroleum Chemical Industry, Jilin 132013,China);Studies and application on SO_4~(2-)/ Fe_2O_3 nanosolid superacid systems[J];Journal Fo Molecular Science;2002-01
6 Zhou Henghui Ci Yunxiang (College of Chemistry & Molecular Engineering, Peking University, Beijing 100871,China) Liu Changyan (Institute of Chemistry, The Chinese Academy of Sciences, Beijing 100080, China);Progress in Studies of the Electrode Materials for Li Ion Batteries[J];PROGRESS IN CHEMISTRY;1998-01
©2006 Tsinghua Tongfang Knowledge Network Technology Co., Ltd.(Beijing)(TTKN) All rights reserved