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《Electronic Components $ Materials》 2005-01
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Fabrication of BST Thick Films Using a New Sol-gel Process

CHEN Shu-ting, YAO Xi, ZHANG Liang-ying (Functional Materials Research Laboratory, Tongji University, Shanghai 200092, China)  
Ba0.6Sr0.4TiO3 powders were produced by conventional high temperature solid-state reactions method. Then the powders were ball milled into sizes of nanometer by a higher energy planetary ball mill machine and uniformly dispersed into BST sol-gel matrix whose composition is same as the powders. 6.5 μm thick films were fabricated using a spin-coating method. The XRD analysis indicates that the thick films annealed at 650℃ possess single-phase perovskite type structure. The SEM micrograph shows that the thick films are uniform and crack-free. Dielectric constant εr and dielectric loss tgδ of the thick film annealed at 800℃ are 455, 0.036, respectively.
【Fund】: 国家“973”计划资助项目(2002CB613304);; 上海市重点学科资助项目(0152NM038)
【CateGory Index】: TN304
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