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《JOURNAL OF ELECTRON DEVICES》 1996-03
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A Planar Vibrator Micromechanical Silicon Accelerometer

Mao Pansong (Department of Electronic Engineering Southeast universty)  
In this paper,the operating principle of a planar vibrator micromechanical silicon accelerometer, the way of preparation and the designing of the detecting circuit are introduced.
【CateGory Index】: TN305.1
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