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《ACTA ELECTRONICA SINICA》 2000-02
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Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers

Hu Ming 1,B.Shen 2,W.Allegretto 2,A.M.Robinson 2(1 Electron Information Engineering Institute Tianjin University,Tianjin 300072,China; 2 Dept.of E.E.University of Alberta Edmonton,Canada T6G 2G7)  
A novel megnetically actuated micromachined deflector with structure of multiple nested cantilevers is designed and fabricated.The device is manufactured using 1 2μm CMOS process followed by anisotropoic etching.Actuation is produced by Lorentz force due to interaction between the currents flowing in the cantilevers and an external magnetic field.Static and dynamic responses are measured.The results show that the deflector has the features of a large,bidirectional angular deflection and fast time response.
【CateGory Index】: TN303
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【Co-references】
Chinese Journal Full-text Database 10 Hits
1 LIU Guo hong(Department of Maths & Physics,Anhui Institute of Architecture & Industry,Hefei,230022,China);MEASURING THE DISPLACEMENT BY DOUBLE EXPOSURE[J];Journal of Anhui Institute of Architecture;2004-03
2 Yuan Quan(Department of Applied Physics, Beijing Polytechnic Univeroity, 100022);A Modification of the White-light Speckle Measuring Technique[J];JOURNAL OF BEIJING POLYTECHNIC UNIVERSITY;1995-03
3 Wang Wensheng; Xu Bin(Dep. of Optical and Electrical Engineering, Changchun Inst. & Fine Mech. );The application of digital filter in interferometry[J];Journal of Changchun Institute of Optics and Fine Mechanics;1995-03
4 ZHAO Yu liang, ZHANG Qing chen, LI Kai duan (Qingdao Branch,Naval Aeronautical Engineering Academy,Qingdao 266041,China);CCD displacement sensor based on holographic grating[J];Journal of Transducer Technology;2002-02
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6 ZHENG Guangzhao(Faculty of Information Engineering,GDUT,Guangzhou 510643,China);On Electronic Speckle Pattern Interferometry[J];Journal of Guangdong University of Technology;2002-03
7 SUN Ping, ZHANG Xi (Shanghai Marine Diesel Engine Research Institute,Shanghai 200090,China);Study on Phase-shifting Techniques in ESPI[J];Journal of Optoelectronics.laser;2001-11
8 MA Jiazhi HU Ming TIAN Bin ZHANG Zhisheng WANG Bo(School of Electronic Information Engineering, Tianjin University, 300072, CHN);Porous Silicon and Its Applications in MEMS[J];Research & Progress of Solid State Electronics;2003-01
9 YAN Jing zhou 1, LEI Fan 2, ZHOU Bi fang 2(1. Beijing Aerospace Automatic Control Institute, Beijing 100854, China) (2. Beijing Meteorological Bureau, Beijing 100081) (3. Nanjing Astronomical Instruments Research Center, Chinese Academy of Scienc;A method for automatic extracting of characteristic information in interferogram analysis[J];OPTICAL TECHNOLOGY;2000-01
10 LU Xiao xu, ZHONG Li yun, HUANG Shou jiang, LI Chuan, YANG Qi min, ZHANG Yong an (Laser Research Institute,Kunming Institute of Science and Technology, Kunming 650051, China);Object shape measurement using Fourier transform profilometry and holographic interference fringe[J];Optical Technology;2002-01
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