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Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers

Hu Ming 1,B.Shen 2,W.Allegretto 2,A.M.Robinson 2(1 Electron Information Engineering Institute Tianjin University,Tianjin 300072,China; 2 Dept.of E.E.University of Alberta Edmonton,Canada T6G 2G7)  
A novel megnetically actuated micromachined deflector with structure of multiple nested cantilevers is designed and fabricated.The device is manufactured using 1 2μm CMOS process followed by anisotropoic etching.Actuation is produced by Lorentz force due to interaction between the currents flowing in the cantilevers and an external magnetic field.Static and dynamic responses are measured.The results show that the deflector has the features of a large,bidirectional angular deflection and fast time response.
【CateGory Index】: TN303
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