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《Journal of Chinese Electron Microscopy Society》 1991-01
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Study on Sample-Probe Automatically Approaching In STM

Song Jianping;Tang Tiantong Insitute of Electronic Materials and Devices Xi'an Jiaotong University  
A simple walker has been designed and fabricated for coarse positioning of sample holder in our scanningtrnneling microscope The extension part of the walker, which can extend or contract when being applied voltage,is made of piezoelectric ceramic, and the feet, which can clamped on the base plate, are made of silicon diskscovered with oxide film. The average step size of the walker was calculated and measured. The effect of stepvoltage on the feedback system, when the walker moves, was discussed. A sample-probe approaching mode wasproposed to avoid damage of the tip and the sample.
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